A simple tool for quality evaluation of the...

A simple tool for quality evaluation of the microcrystalline silicon prepared at high growth rate

J. Kočka, T. Mates, M. Ledinský, H. Stuchlíková, J. Stuchlík, A. Fejfar
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Volume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.09.052
File:
PDF, 367 KB
english, 2008
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