![](/img/cover-not-exists.png)
Analysis of data from various indentation techniques for thin films intrinsic hardness modelling
D. Chicot, E. Bemporad, G. Galtieri, F. Roudet, M. Alvisi, J. LesageVolume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.10.003
File:
PDF, 975 KB
english, 2008