Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy
Masanori Shinohara, Ken Cho, Hiromichi Shibata, Keishi Okamoto, Tatsuyuki Nakatani, Yoshinobu Matsuda, Hiroshi FujiyamaVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.10.014
File:
PDF, 353 KB
english, 2008