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Large area VHF plasma production by a balanced power feeding method
T. Nishimiya, Y. Takeuchi, Y. Yamauchi, H. Takatsuka, T. Shioya, H. Muta, Y. KawaiVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.10.016
File:
PDF, 317 KB
english, 2008