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Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C4F8 plasmas
Kenji Furuya, Ryoichi Nakanishi, Hiroshi Okumura, Makoto Makita, Akira HarataVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.10.112
File:
PDF, 599 KB
english, 2008