Influence of substrate type on surface structure of...

Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C4F8 plasmas

Kenji Furuya, Ryoichi Nakanishi, Hiroshi Okumura, Makoto Makita, Akira Harata
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.10.112
File:
PDF, 599 KB
english, 2008
Conversion to is in progress
Conversion to is failed