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A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges
A.M. Efremov, V.I. Svettsov, D.V. Sitanov, D.I. BalashovVolume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2007.11.046
File:
PDF, 267 KB
english, 2008