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Tungsten atomic layer deposition on polymers
C.A. Wilson, J.A. McCormick, A.S. Cavanagh, D.N. Goldstein, A.W. Weimer, S.M. GeorgeVolume:
516
Year:
2008
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2007.11.086
File:
PDF, 1.09 MB
english, 2008