Bonding of Lead Zirconate Titanate Ceramics to Si Single Crystals for Microdevices
Tanaka, Katsuhiko, Konishi, Takahiro, Kuze, Wataru, Sugiyama, SusumuVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.6672
Date:
September, 2004
File:
PDF, 102 KB
english, 2004