Effect of negatively charged species on the growth behavior of silicon films in hot wire chemical vapor deposition
Jean-Ho Song, Sang Hoon Pak, Nong-Moon Hwang, Hyun Jae KimVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.02.019
File:
PDF, 526 KB
english, 2008