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Bonding structure of a-CNx:H films obtained in methane–nitrogen system and its influence on hardness
Jing Ni, Weidong Wu, Xin Ju, Xiangdong Yang, Zhimei Chen, Yongjian TangVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.02.035
File:
PDF, 495 KB
english, 2008