Feasibility of real-time detection of abnormality in inter...

Thin Solid Films 2008 Vol. 516; Iss. 21

Feasibility of real-time detection of abnormality in inter layer dielectric slurry during chemical mechanical planarization using frictional analysis

Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Michael Goldstein, Ara Philipossian
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Volume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2008.02.047
File:
PDF, 909 KB
english, 2008
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