Thermal stability of tungsten–titanium diffusion barriers...

Thin Solid Films 2008 Vol. 516; Iss. 21

Thermal stability of tungsten–titanium diffusion barriers for silver metallization

S.K. Bhagat, N.D. Theodore, T.L. Alford
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Volume:
516
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2008.03.021
File:
PDF, 887 KB
english, 2008
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