Stress-induced surface damages in Ti–Si–N films grown by...

Thin Solid Films 2008 Vol. 516; Iss. 21

Stress-induced surface damages in Ti–Si–N films grown by magnetron sputtering

Zong-Jian Liu, Ning Jiang, Y.G. Shen, Xiaonian Li
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2008.04.090
File:
PDF, 1.13 MB
english, 2008
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