Electrical characteristics of Ti-doped Ta2O5 stacked...

Thin Solid Films 2008 Vol. 516; Iss. 23

Electrical characteristics of Ti-doped Ta2O5 stacked capacitors

E. Atanassova, D. Spassov, A. Paskaleva, M. Georgieva, J. Koprinarova
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Volume:
516
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2008.05.003
File:
PDF, 880 KB
english, 2008
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