Eliminating carbon contamination on oxidized Si surfaces...

Eliminating carbon contamination on oxidized Si surfaces using a VUV excimer lamp

Elisabeth (Liz) Strein, David Allred
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Volume:
517
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.06.046
File:
PDF, 573 KB
english, 2008
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