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A study of stacked PECVD silicon nitride films used for surface micromachined membranes
M. Mikolajūnas, R. Kaliasas, M. Andrulevičius, V. Grigaliūnas, J. Baltrušaitis, D. ViržonisVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.06.063
File:
PDF, 691 KB
english, 2008