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Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
S. Massl, H. Köstenbauer, J. Keckes, R. PippanVolume:
516
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2008.06.091
File:
PDF, 871 KB
english, 2008