Ex-situ wet clean and in-situ hydrogen clean for Si and...

Ex-situ wet clean and in-situ hydrogen clean for Si and SiGe epitaxy

Thomas Kormann, Philippe Garnier, Guillaume Chabanne, Arnoud Fortuin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
517
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2008.08.014
File:
PDF, 365 KB
english, 2008
Conversion to is in progress
Conversion to is failed