Initial oxidation of HF-acid treated SiGe(100) surfaces under air exposure investigated by synchrotron radiation X-ray photoelectron spectroscopy and IR absorption spectroscopy
Yuzuru Narita, Fumihiko Hirose, Masaya Nagato, Yuta KinoshitaVolume:
517
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2008.08.043
File:
PDF, 374 KB
english, 2008