pMOS transistor with embedded SiGe: Elastic and plastic...

Thin Solid Films 2008 Vol. 517; Iss. 1

pMOS transistor with embedded SiGe: Elastic and plastic relaxation issues

A. Hikavyy, N. Bhouri, R. Loo, P. Verheyen, F. Clemente, J. Hopkins, R. Trussell, M. Caymax
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Volume:
517
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2008.08.107
File:
PDF, 365 KB
english, 2008
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