Low temperature epitaxy and the importance of moisture...

Thin Solid Films 2008 Vol. 517; Iss. 1

Low temperature epitaxy and the importance of moisture control

F.E. Leys, A. Hikavyy, V. Machkaoutsan, B. De Vos, L. Geenen, B. Van Daele, R. Loo, M. Caymax
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Volume:
517
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2008.08.139
File:
PDF, 228 KB
english, 2008
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