Damage-Free Design of a Megasonic Waveguide for...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 6

Damage-Free Design of a Megasonic Waveguide for Single-Wafer Processing

Ahn, Youngki, Yoo, Donghyun, Yang, Jichul, Min, Jaewon, Kim, Jeongin, Lee, Heemyung, Kulkarni, Atul, Kim, Taesung
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3381024
File:
PDF, 606 KB
english, 2010
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