Erratum to “Rapid synthesis of tantalum oxide dielectric...

Thin Solid Films 2009 Vol. 517; Iss. 20

Erratum to “Rapid synthesis of tantalum oxide dielectric films by microwave assisted atmospheric chemical vapor deposition” [Thin Solid Films 516 (2008) 8307–8314]

Nicholas Ndiege, Vaidyanathan Subramanian, Mark A. Shannon, Richard I. Masel
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Volume:
517
Year:
2009
Language:
english
DOI:
10.1016/j.tsf.2008.10.034
File:
PDF, 71 KB
english, 2009
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