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Layer by layer deposition of zirconium oxide onto silicon
G. Freiman, P. Barboux, J. Perrière, K. GiannakopoulosVolume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.10.112
File:
PDF, 698 KB
english, 2009