Optical properties of ion-implanted silicon and separation by implantation of oxygen silicon-on-insulator substrates in the infrared: Study of B+ and P2+ implantation doping
C.C. Katsidis, D.I. SiapkasVolume:
517
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2008.11.144
File:
PDF, 409 KB
english, 2009