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Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N2 as doping gas
Yoshiki Hoshide, Akimori Tabata, Akihiko Kitagawa, Akihiro KondoVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.01.045
File:
PDF, 690 KB
english, 2009