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Hot-wire chemical vapor deposition of silicon nanoparticles on fused silica
Navneethakrishnan Salivati, Yong Q. An, Michael C. Downer, John G. EkerdtVolume:
517
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.01.060
File:
PDF, 312 KB
english, 2009