Selective liquid phase deposition of silicon oxide at low...

Thin Solid Films 2009 Vol. 517; Iss. 14

Selective liquid phase deposition of silicon oxide at low temperature for nanometer-scale structures

Kyoung Seob Kim, Yonghan Roh
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Volume:
517
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.01.105
File:
PDF, 618 KB
english, 2009
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