Issues of contact etching and pre-treatment in Schottky contact
Haksun Lee, Kyoungsub Shin, Nammyun Cho, Gyungjin Min, Changjin Kang, Woosung Han, Jootae MoonVolume:
517
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.01.143
File:
PDF, 615 KB
english, 2009