Issues of contact etching and pre-treatment in Schottky...

Issues of contact etching and pre-treatment in Schottky contact

Haksun Lee, Kyoungsub Shin, Nammyun Cho, Gyungjin Min, Changjin Kang, Woosung Han, Jootae Moon
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Volume:
517
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.01.143
File:
PDF, 615 KB
english, 2009
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