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The structure of Si–SiO2 layers with high excess Si content prepared by magnetron sputtering
N. Baran, B. Bulakh, Ye Venger, N. Korsunska, L. Khomenkova, T. Stara, Y. Goldstein, E. Savir, J. JedrzejewskiVolume:
517
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.01.154
File:
PDF, 478 KB
english, 2009