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Process development of ITO source/drain electrode for the top-gate indium–gallium–zinc oxide transparent thin-film transistor
Woo-Seok Cheong, Young-sun Yoon, Jae-Heon Shin, Chi-Sun Hwang, Hye Yong ChuVolume:
517
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.01.181
File:
PDF, 647 KB
english, 2009