Study of the inductively coupled plasma assisted DC magnetron sputtering (ICPDMS) during ITO deposition
Ie Hong Yang, Youjong Lee, Jin Nyeung Jang, MunPyo HongVolume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.02.032
File:
PDF, 651 KB
english, 2009