Atomic layer deposition of MnO using...

Thin Solid Films 2009 Vol. 517; Iss. 19

Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O

B.B. Burton, F.H. Fabreguette, S.M. George
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Volume:
517
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2009.02.050
File:
PDF, 619 KB
english, 2009
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