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The effect of thermal annealing sequence on amorphous InGaZnO thin film transistor with a plasma-treated source–drain structure
Hyun Soo Shin, Byung Du Ahn, Kyung Ho Kim, Jin-Seong Park, Hyun Jae KimVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.02.071
File:
PDF, 386 KB
english, 2009