Property variations of direct-current reactive magnetron...

Property variations of direct-current reactive magnetron sputtered copper oxide thin films deposited at different oxygen partial pressures

Hsin-Chun Lu, Chun-Lung Chu, Chi-You Lai, Yu-Hsiang Wang
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Volume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.02.079
File:
PDF, 709 KB
english, 2009
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