Solid phase epitaxy on N-type polysilicon films formed by...

Thin Solid Films 2009 Vol. 517; Iss. 23

Solid phase epitaxy on N-type polysilicon films formed by aluminium induced crystallization of amorphous silicon

Ö. Tüzün, A. Slaoui, S. Roques, A. Focsa, F. Jomard, D. Ballutaud
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Volume:
517
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.02.091
File:
PDF, 491 KB
english, 2009
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