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High density plasma treatment of polyimide substrate to improve structural and electrical properties of Ga-doped ZnO films
S.I. Kwon, S.J. Lee, T.H. Jung, S.B. Park, J.H. Park, W.C. Song, I.N. Kang, D.G. LimVolume:
517
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.02.112
File:
PDF, 284 KB
english, 2009