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Study on the structural, electrical, and optical properties of aluminum-doped zinc oxide films by direct current pulse reactive magnetron sputtering
Gao Xiao-Yong, Lin Qing-Geng, Feng Hong-Liang, Liu Yu-Fen, Lu Jing-XiaoVolume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.02.133
File:
PDF, 918 KB
english, 2009