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Investigation of atmospheric-pressure plasma deposited SiOx films on polymeric substrates
Chun Huang, Chi-Hung Liu, Chun-Hsien Su, Wen-Tung Hsu, Shin-Yi WuVolume:
517
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.03.054
File:
PDF, 343 KB
english, 2009