Effects of different nitrogen/methane ratios on the...

Effects of different nitrogen/methane ratios on the residual stress of a-C:N thin films prepared by plasma enhanced chemical vapor deposition

Rong-Shian Chu, Sham-Tsong Shiue
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Volume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.03.085
File:
PDF, 362 KB
english, 2009
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