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Optical properties and hydrophilic behaviors of TaOxNy thin films with and without rapid thermal annealing
J.H. Hsieh, C.C. Chang, J.S. Cherng, F.Y. HsuVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.03.108
File:
PDF, 483 KB
english, 2009