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The effect of helium plasma etching on polymer-based optoelectronic devices
David Keith Chambers, Brijesh Raut, Difei Qi, Chad B. O'Neal, Sandra Zivanovic SelmicVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.03.199
File:
PDF, 402 KB
english, 2009