Structural and Photoluminescence Properties of H+ Ion-Implanted Silicon-on-Insulator Structures Formed by Hydrogen Slicing
Tyschenko, I.E., Talochkin, A.B., Zhuravlev, K.S., Obodnikov, V.I., Popov, V.P.Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.509
File:
PDF, 342 KB
2002