Structured ZnO-based contacts deposited by non-reactive rf...

Thin Solid Films 2009 Vol. 518; Iss. 4

Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Barnabé, M. Lalanne, L. Presmanes, J.M. Soon, Ph. Tailhades, C. Dumas, J. Grisolia, A. Arbouet, V. Paillard, G. BenAssayag, M.A.F. van den Boogaart, V. Savu, J. Brugger, P. Normand
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Volume:
518
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.03.232
File:
PDF, 268 KB
english, 2009
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