Oxygen plasma etching of silver-incorporated diamond-like carbon films
F.R. Marciano, L.F. Bonetti, R.S. Pessoa, M. Massi, L.V. Santos, V.J. Trava-AiroldiVolume:
517
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.04.037
File:
PDF, 347 KB
english, 2009