Modeling of Si3N4 Thin Layers Deposition out of Gaseous...

Materials Science Forum 1993 Vol. 126-128

Modeling of Si3N4 Thin Layers Deposition out of Gaseous Phase

Kostenko, S.P., Potchkin, Yu A., Tishchenko, G.D.
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Volume:
126-128
Year:
1993
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.126-128.829
File:
PDF, 239 KB
1993
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