ZnO layers grown by Atomic Layer Deposition: A new material...

Thin Solid Films 2009 Vol. 518; Iss. 4

ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide

M. Godlewski, E. Guziewicz, G. Łuka, T. Krajewski, M. Łukasiewicz, Ł. Wachnicki, A. Wachnicka, K. Kopalko, A. Sarem, B. Dalati
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Volume:
518
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.04.066
File:
PDF, 189 KB
english, 2009
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