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Low temperature remote plasma sputtering of indium tin oxide for flexible display applications
S.J. Wakeham, M.J. Thwaites, B.W. Holton, C. Tsakonas, W.M. Cranton, D.C. Koutsogeorgis, R. RansonVolume:
518
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.04.072
File:
PDF, 310 KB
english, 2009