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The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity
O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, M. GrösslVolume:
517
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2009.05.009
File:
PDF, 675 KB
english, 2009