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ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - The Impact of Isolation Methods on Device Characteristics in Bulk FinFET Using TCAD Simulation
Ren, Zhe, Yin, HuaxiangYear:
2012
Language:
english
DOI:
10.1149/1.3694460
File:
PDF, 275 KB
english, 2012